Nanotechnology & Micro Electrical-Mechanical Systems

16983

What is Micro Electro-Mechanical Systems? MEMS (coined in late 80’s) stands for microelectromechanical systems, and used to mean micron-sized, transducing (electrical to mechanical and vice versa) devices and systems during late 80’s and early 90’s. But nowadays MEMS covers many non-electromechanical systems such as microfluidic, biological, chemical systems built on silicon, glass and plastic substrates using technology involving micromachining, photolithography, and thin film technologies. The size covered in MEMS also varies from nanometer to millimeter. MEMS has its technological roots in IC fabrication technology, but involves some novel fabrication techniques such as bulk/surface micromachining, deep dry etching of silicon, LIGA, etc. MEMS technology is now clearly perceived as a generic technology that can enable and/or enhance many systems for inertial sensing, micro total biological/chemcial analysis, optical networking, telecommunication, etc. Some commercial examples of MEMS include accelerometers, pressure sensors, micromirror array for projection display and optical networks, etc.


Faculty

Nanotechnology and Micro Electrical Mechanical Systems

Stephen Cronin
Stephen Burke Cronin
Professor of Electrical and Computer Engineering, Chemistry, and Physics and Astronomy
Paul Dapkus
Paul Daniel Dapkus
William M. Keck Chair in Engineering and Distinguished Professor of Electrical and Computer Engineering, Chemical Engineering and Materials Science, and Physics and Astronomy
Chia-Wei Hsu
Chia Wei (Wade) Hsu
Assistant Professor of Electrical and Computer Engineering
Rehan Kapadia
Rehan Kapadia
Assistant Professor of Electrical and Computer Engineering
Eun-Sok Kim
Eun Sok Kim
Professor of Electrical and Computer Engineering
Daniel Lidar
Daniel Amihud Lidar
Viterbi Professorship in Engineering and Professor of Electrical and Computer Engineering, Chemistry, and Physics and Astronomy
Han Wang
Han Wang
Robert G. and Mary G. Lane Endowed Early Career Chair and Associate Professor of Electrical and Computer Engineering and Chemical Engineering and Materials Science
Wei Wu
Wei Wu
Associate Professor of Electrical and Computer Engineering
Chongwu Zhou
Chongwu Zhou
Professor of Electrical and Computer Engineering