What is Micro Electro-Mechanical Systems? MEMS (coined in late 80’s) stands for microelectromechanical systems, and used to mean micron-sized, transducing (electrical to mechanical and vice versa) devices and systems during late 80’s and early 90’s. But nowadays MEMS covers many non-electromechanical systems such as microfluidic, biological, chemical systems built on silicon, glass and plastic substrates using technology involving micromachining, photolithography, and thin film technologies. The size covered in MEMS also varies from nanometer to millimeter. MEMS has its technological roots in IC fabrication technology, but involves some novel fabrication techniques such as bulk/surface micromachining, deep dry etching of silicon, LIGA, etc. MEMS technology is now clearly perceived as a generic technology that can enable and/or enhance many systems for inertial sensing, micro total biological/chemcial analysis, optical networking, telecommunication, etc. Some commercial examples of MEMS include accelerometers, pressure sensors, micromirror array for projection display and optical networks, etc.
Faculty
Stephen Burke Cronin
Professor of Electrical and Computer Engineering
Paul Daniel Dapkus
Professor Emeritus of Electrical and Computer Engineering
Rehan Kapadia
Colleen and Roberto Padovani Early Career Chair in Electrical and Computer Engineering, and Associate Professor of Electrical and Computer Engineering
Mercedeh Khajavikhan
Professor of Electrical and Computer Engineering
Yasser Khan
Assistant Professor of Electrical and Computer Engineering and of Biomedical Engineering
Eun Sok Kim
William M. Hogue Professor of Electrical and Computer Engineering
Murali Kota
Adjunct Professor of Electrical and Computer Engineering
Daniel Amihud Lidar
Viterbi Professorship in Engineering and Professor of Electrical and Computer Engineering, Chemistry, and Physics and Astronomy
Grace Lu
Professor of Physics and Electrical and Computer Engineering
Anupam Madhukar
Kenneth T. Norris Professor in Engineering and Professor of Chemical Engineering and Materials Science, Biomedical Engineering, and Electrical and Computer Engineering
Ellis Fan-Chuin Meng
Shelly and Ofer Nemirovsky Chair in Convergent Bioscience and Professor of Biomedical Engineering and Electrical and Computer Engineering
Jayakanth Ravichandran
Philip and Cayley MacDonald Endowed Early Career Chair and Professor of Chemical Engineering and Materials Science and Electrical and Computer Engineering
Wei Wu
Professor of Electrical and Computer Engineering
J. Joshua Yang
Arthur B. Freeman Chair Professor of Electrical and Computer Engineering